Patents

Anasys products are covered by one or more of the following patents in the United States: US6095679, US6260997, US6405137, US6200022, US6491425, US7977636, US8001830, US7497613, US8242448, US8177422, US8418538, US8402819, US8387443, US8533861, US8607622, US8646319, US8680467, US8793811, US8869602, US8914911, US9046492, US9372154, US9134341, US9658247, US9778282. Other patents pending.Anasys products are covered by one or more of the following foreign patents: CA2225315, CA2247868, GB2332949, JP3229329, EU0572164. Other patents pending.Patents are listed in chronological order, in descending order. Other patents pending.


Method and apparatus for performing localized thermal analysis and sub-surface imaging by scanning thermal microscopy

US6095679, CA2225315, JP3229329 - April 21, 1997

A platinum/Rhodium resistance thermal probe is used as an active device which acts both as a highly localized heat source and as a detector to perform localized differential calorimetry, by thermally inducing and detecting events such as glass transitions, meltings, recystallizations and thermal decomposition within volumes of material estimated at a few μm3. Furthermore, the probe is used to image variations in thermal conductivity and diffusivity, to perform depth profiling and sub-surface imaging. The maximum depth of the sample that is imaged is controlled by generating and detecting evanescent temperature waves in the sample.
sSNOM & AFM-IR


Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy

US6405137, - December 30, 1997

Sub-micron chemical analysis of the surface and sub-surface of a sample material is performed at, above or under atmospheric pressure, or on for a sample material submerged in a substance. A thermal and/or topographic image of the surface of the sample material is obtained. A location for study is selected using the image. The activation device is positioned over the selected location and surface and/or sub-surface products are ablated, desorbed or decomposed from the sample material to a chemical analyzer for analysis.
scanning-thermal-microscopy


Method and apparatus for high spatial resolution spectroscopic microscopy

US6260997 - October 23, 1998

A sample and a scanning probe microscope system are used as the detector for an infrared spectrometer to circumvent the diffraction limit of conventional infrared microscopy, and to provide spectroscopic images with a greatly improved spatial resolution, potentially as low as a few tens of nanometers. The beam from an infrared spectrometer is directed at the sample. The sample is heated to the extent that it absorbs infrared radiation. Thus the resulting temperature rise of an individual region depends upon the particular molecular species present, as well as the range of wavelengths of the infrared beam. These individual temperature differences are detected by a miniature thermal probe. The thermal probe is mounted in a scanning thermal microscope. The scanning thermal microscope is then operated used to produce multiple surface and sub-surface images of the sample, such that the image contrast corresponds to variations in either thermal diffusivity, surface topography or chemical composition.
localized-thermal-analysis


Method and apparatus for localized dynamic mechano-thermal analysis with scanning probe microscopy

US6200022 - December 31, 1998

A system and method for performing localized mechanothermal analysis with scanning probe microscopy (“MASM”) is disclosed. In a preferred embodiment an image of the surface or subsurface of a sample is created. A localized region of the sample is selected from the image. Using a scanning microscope, an active or passive thermal probe is positioned at the selected region. A temperature ramp is applied to the localized region. In addition, a dynamic or modulated stress or strain is applied to the localized region. Force data resulting from the applied temperature and stress or strain is collected and processed to produce a graph or fingerprint of the dynamic mechanical and/or calorimetric properties of the selected localized region.
micro-thermal-analysis


Method and apparatus for localized mechanothermal analysis combined with scanning probe microscopy

GB2332949 - July 07, 1999

A system and method for performing localized mechanothermal analysis with scanning probe microscopy ("MASM") is disclosed. In a preferred embodiment an image of the surface or subsurface of a sample (104) is created. A localized region of the sample (104) is selected from the image. Using a scanning microscope (103), an active or passive thermal probe is positioned (108) at the selected region. A temperature ramp is applied to the localized region. In addition, a dynamic or modulated stress or strain is applied to the localized region. Force data resulting from the applied temperature and stress or strain is collected and processed to produce a graph or fingerprint of the dynamic mechanical and/or calorimetric properties of the selected localized region.
MASM


Method and apparatus for performing localized thermal analysis and sub-surface imaging by scanning thermal microscopy

US6491425 - June 1, 2000

A platinum/Rhodium resistance thermal probe is used as an active device which acts both as a highly localized heat source and as a detector to perform localized differential calorimetry, by thermally inducing and detecting events such as glass transitions, meltings, recystallizations and thermal decomposition within volumes of material estimated at a few μm3. Furthermore, the probe is used to image variations in thermal conductivity and diffusivity, to perform depth profiling and sub-surface imaging. The maximum depth of the sample that is imaged is controlled by generating and detecting evanescent temperature waves in the sample.
localized TA


Probe with embedded heater for nanoscale analysis

US7497613 - April 18, 2006

The invention is a heated thermal probe suitable for use in micro-thermal analysis or other high resolution thermal measurements and actions. The probe is, in the preferred embodiment, a microfabricated cantilever with a sharp probe tip of a type used in Scanning Probe Microscopes (SPM's) which further includes an integral resistive heating element. The heating element is formed by doping regions of the cantilever with an ion implant process to make lower resistance connections and a higher resistance heating element. There is no spatial overlap between the base of the probe tip and the heating element or conductors.
heated probe


High frequency deflection measurement of IR absorption

US8001830 - May 15, 2007

An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
HF deflection measurement


Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy

CA2247868 - May 22, 2007

material is performed at, above or under atmospheric pressure, or on for a sample material submerged in a substance. A thermal and/or topographic image of the surface of the sample material is obtained. A location for study is selected using the image. The activation device is positioned over the selected location and surface and/or sub-surface products are ablated, desorbed or decomposed from the sample material to a chemical analyzer for analysis.
SThM


Infrared imaging using thermal radiation from a scanning probe tip

US7977636 - August 12, 2008

A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.
infrared imaging


Transition temperature microscopy

US8177422 - August 15, 2008

A system and method for automatic analysis of temperature transition data over an area of a sample surface. The system relies on the use of a microfabricated probe, which can be rapidly heated and cooled and has a sharp tip to provide high spatial resolution. The system also has fast x-y-z positioners, data collection, and algorithms that allow automatic analysis of and visualization of temperature transition data.
transition temp microscopy


High frequency deflection measurement of IR absorption

US8402819 - December 5, 2008

An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
HF deflection measurement


Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer

US8387443 - September 11, 2009

Described herein are devices and methods for sensing pulsed forces. Some of the described devices and methods are also useful for measuring infrared absorbances and compiling spectral and chemical maps of surfaces. Also described are microcantilever having reduced harmonic frequencies when operating in contact mode. Some of the described microcantilevers comprise an internal resonator configured to vibrate substantially independent of friction between the microcantilever tip and a surface when the microcantilever operates in contact mode. A number of the described devices and methods are useful for monitoring pulsed forces with enhanced sensitivity.
microcantilever


Dynamic power control for nanoscale spectroscopy

US8646319 - February 23, 2010

Dynamic IR radiation power control for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise.
dynamic power control


Dynamic power control, beam alignment and focus for nanoscale spectroscopy

US8242448 - November 9, 2010

Dynamic IR radiation power control, beam steering and focus adjustment for use in a nanoscale IR spectroscopy system based on an Atomic Force Microscope. During illumination with a beam from an IR source, an AFM probe tip interaction with a sample due to local IR sample absorption is monitored. The power of the illumination at the sample is dynamically decreased to minimize sample overheating in locations/wavelengths where absorption is high and increased in locations/wavelengths where absorption is low to maintain signal to noise. Beam alignment and focus optimization as a function of wavelength are automatically performed.
dynamic power control


High frequency deflection measurement of IR absorption

US8607622 - July 18, 2011

An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
HF deflection measurement


High frequency deflection measurement of IR absorption with a modulated IR source

US8680467 - September 19, 2011

A method of obtaining submicron resolution IR absorption data from a sample surface. A probe microscope probe interacts with the sample surface while a tunable source of IR radiation illuminates the sample-tip interaction region. The source is modulated at a frequency substantially overlapping the resonant frequency of the probe and may be modulated at the contact resonance frequency of the probe when the probe is in contact with the sample surface. The modulation frequency is continually adjusted to account for shifts in the probe resonant frequency due to sample or other variations. A variety of techniques are used to observe such shifts and accomplish the adjustments in a rapid manner.
HF deflection modulated


High frequency deflection measurement of IR absorption

US8418538 - November 4, 2011

An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Significant issues as to size, cost of implementation, and repeatability/robustness of results exist in commercializing the technique. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.
HF deflection measurement


Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy

US8533861 - November 23, 2011

Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
magnetic actuation cantilever


High frequency deflection measurement of IR absorption 

US8869602 - November 30, 2011

An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface by using the AFM probe to detect wavelength dependent IR radiation interaction, typically absorption with the sample in the region of the tip. The tip may be configured to produce electric field enhancement when illuminated by a radiation source. This enhancement allows for significantly reduced illumination power levels resulting in improved spatial resolution by confining the sample-radiation interaction to the region of field enhancement which is highly localized to the tip.
HF deflection measurement


Multiple modulation heterodyne infrared spectroscopy 

US9134341, US20120204296 - March 16, 2012

A heterodyne detection technique for highly localized IR spectroscopy based on an AFM. A pulsed IR source illuminates a sample and causes contact resonance of an AFM probe, which is a function of localized absorption. The probe is operated in intermittent contact mode and is therefore oscillated at a resonance frequency. A secondary oscillation is mixed in to the probe oscillation such that the sum of the secondary oscillation and the IR source pulse frequency is near another harmonic of the probe. A mixing effect causes measurable probe response at the other harmonic allowing data to be taken away from the pulse frequency


Stimulated raman nanospectroscopy

US9046492 - November 3, 2012

A method for achieving measurable sample heating in the vicinity of a probe microscope tip using Stimulated Raman Spectroscopy. Two laser sources, preferably in the UV visible or near IR illuminate the sample, preferably in overlapping diffraction limited spots. At least one of the sources is swept through a frequency range such that the difference frequency corresponds to IR spectral regions of interest. Selective Absorption by differing sample materials at the difference frequency causes measurable sample heating detectable by the probe tip related to IR spectral absorption bands. Thus very high spatial resolution IR spectroscopy may be achieved.
raman spectroscopy


Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy

US8914911 - March 14, 2013

Described are methods for magnetically actuating microcantilevers and magnetically actuated and self-heated microcantilevers. Also described are methods for determining viscoelastic properties and thermal transition temperatures of materials.
microcantilever


Method and apparatus for infrared scattering scanning near-field optical microscopy 

US8793811 - March 15, 2013

This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques.
s-SNOM


Method and apparatus for infrared scattering scanning near-field optical microscopy

US9372154 - July 2, 2014

This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration.
s-SNOM


Method and apparatus for infrared scattering scanning near-field optical microscopy with high speed point spectroscopy

US9658247, US20170003316, DE102016103311A1 - March 1, 2015

This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.


Method and apparatus for infrared scattering scanning near-field optical microscopy with high speed point spectroscopy

US9778282, US20170219622, - April 14, 2017

This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration. In other embodiments an absorption spectrum may be obtained directly by comparing properties from a known and unknown region of a sample as a function of illumination center wavelength.